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  • Scatterometry measurement of sub-0.1 mu m linewidth gratings
    Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 16, No. 1. (1998), pp. 80-87.
    by Stephen A Coulombe, Babar K Minhas, Christopher J Raymond, Sohail, John R Mcneil
    posted to gratings metrology scatterometry by eyliu on 2006-03-07 20:12:37 as ***** along with 1 person jeriksson
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